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Novellus Systems, Inc. (NVLS) Announces Availability of Ashable Hard Mask Process Technology to the VECTOR Extreme Platform

Novellus Systems, Inc. (NVLS), based in San Jose, California, is a provider of advanced process equipment for the global semiconductor industry. The company is a supplier of chemical vapor deposition (CVD), physical vapor deposition (PVD), electrochemical deposition (ECD), chemical mechanical planarization (CMP), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors. Products such as the CVD, PVD and ECD are used to deposit extremely thin films of insulating and conductive materials that are used to create the wiring on a chip.

Novellus has announced the availability of an ashable hard mask (AHM) process configuration for the company’s high-productivity VECTOR Extreme™ (PECVD) platform. The VECTOR Extreme platform was introduced in July 2007 and has 30 systems pending for installation worldwide by the end of 2008. The new VECTOR Extreme AHM system allows Novellus to participate in the growing AHM market while meeting the productivity demands of the emerging memory megafabs.

The AHM technology uses a unique RF power configuration, optimized-process gas chemistry and integrated post-deposition Edge Bevel film Removal (EBR). This process produces the highest-quality films with the easiest integration for 44nm manufacturing and below. The VECTOR Extreme platform is on display from July 15-17, 2008 during SEMICON West at the Novellus exhibit in the Yerba Buena Center for the Arts.

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